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Characteristics of TiSi~2 contact to BF~2-doped single-silicon

Choi, J. S. / Paek, S. H. / Hwang, Y. S. / Choi, S. H.

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Characteristics of TiSi~2 contact to BF~2-doped single-silicon

Choi, J. S. / Paek, S. H. / Hwang, Y. S. / Choi, S. H.

Characteristics of TiSi~2 contact to BF~2-doped single-silicon

Choi, J. S. / Paek, S. H. / Hwang, Y. S. / Choi, S. H.

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Order at Subito €

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Document information

Title:

Characteristics of TiSi~2 contact to BF~2-doped single-silicon

Contributors:

Choi, J. S. (author) / Paek, S. H. (author) / Hwang, Y. S. (author) / Choi, S. H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 28 ; 4878

Publication date:

1993-01-01

Size:

4878 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Affronte, M. / Laborde, O. / Gottlieb, U. et al. | British Library Online Contents | 1996

Depth Profiling of Thin TiSi~x-Films on Silicon Carbide by SNMS

Getto, R. / Freytag, J. / Kopnarski, M. et al. | British Library Online Contents | 1998

The influence of silicon substrate crystallinity and doping on TiSi~2 thin film morphology

Karlin, T. E. / Nygren, S. / Mattsson, L. et al. | British Library Online Contents | 1993

The morphological degradation mechanism of TiSi~2/Si structure

Hwang, Y. S. / Paek, S. H. / Kim, H. S. et al. | British Library Online Contents | 1993

Istorija TISI-TGASU v dokumentach i materialach : sbornik dokumentov

Tomskij Gosudarstvennyj Architekturno-Stroitelʹnyj Universitet | TIBKAT | 2002