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Ultramicrohardness Measurement of Silicon Nitride Films

Cai, X. / Wang, J. F. / Zhou, P. N. / Liu, X. H.

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Ultramicrohardness Measurement of Silicon Nitride Films

Cai, X. / Wang, J. F. / Zhou, P. N. / Liu, X. H.

Ultramicrohardness Measurement of Silicon Nitride Films

Cai, X. / Wang, J. F. / Zhou, P. N. / Liu, X. H.

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Document information

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Document information

Title:

Ultramicrohardness Measurement of Silicon Nitride Films

Contributors:

Cai, X. (author) / Wang, J. F. (author) / Zhou, P. N. (author) / Liu, X. H. (author) / Hoffmann, M. J. / Becher, P. F. / Petzow, G.

Published in:

Silicon Nitride 93 ; 547

KEY ENGINEERING MATERIALS

Publication date:

1994-01-01

Size:

547 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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