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Preparation of silicon carbide nitride thin films by sputtering of silicon nitride target
Preparation of silicon carbide nitride thin films by sputtering of silicon nitride target
Preparation of silicon carbide nitride thin films by sputtering of silicon nitride target
APPLIED SURFACE SCIENCE ; 173 ; 313-317
2001-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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