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    Dopant redistribution during the formation of tungsten disilicide by rapid thermal processing

    New search for: Dupuy, J. C.
    New search for: Essaadani, A.
    New search for: Sibai, A.
    New search for: Barbier, D.

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    Dopant redistribution during the formation of tungsten disilicide by rapid thermal processing

    New search for: Dupuy, J. C.
    New search for: Essaadani, A.
    New search for: Sibai, A.
    New search for: Barbier, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Dopant redistribution during the formation of tungsten disilicide by rapid thermal processing

    New search for: Dupuy, J. C.
    New search for: Essaadani, A.
    New search for: Sibai, A.
    New search for: Barbier, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Dopant redistribution during the formation of tungsten disilicide by rapid thermal processing

    Contributors:

    Dupuy, J. C. (author) / Essaadani, A. (author) / Sibai, A. (author) / Barbier, D. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 22 ; 168

    Publication date:

    1994-01-01

    Size:

    168 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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