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    Analytical expressions for sputter and diffusion-modified ion implantation profiles

    New search for: Martan, J.

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    Analytical expressions for sputter and diffusion-modified ion implantation profiles

    New search for: Martan, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Analytical expressions for sputter and diffusion-modified ion implantation profiles

    New search for: Martan, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Analytical expressions for sputter and diffusion-modified ion implantation profiles

    Contributors:

    Martan, J. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 22 ; L1

    Publication date:

    1994-01-01

    Size:

    L1

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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