PECVD of Silicon Dioxide from TEOS/Oxygen Mixtures: Fid-Bau Portal

PECVD of Silicon Dioxide from TEOS/Oxygen Mixtures

Cale, T. S. / Raupp, G. B.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

PECVD of Silicon Dioxide from TEOS/Oxygen Mixtures

Cale, T. S. / Raupp, G. B.

PECVD of Silicon Dioxide from TEOS/Oxygen Mixtures

Cale, T. S. / Raupp, G. B.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

PECVD of Silicon Dioxide from TEOS/Oxygen Mixtures

Contributors:

Cale, T. S. (author) / Raupp, G. B. (author)

Published in:

MATERIALS SCIENCE FORUM ; 1

Publication date:

1993-01-01

Size:

1 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Suzuki, N. / Masu, K. / Tsubouchi, K. | British Library Online Contents | 1994

PECVD Deposited TEOS for Field-Effect Mobility Improvement in 4H-SiC MOSFETs on the (0001) and (11-20) Faces

Perez-Tomas, A. / Godignon, P. / Camassel, J. et al. | British Library Online Contents | 2006

Organic and organic–inorganic hybrid polymer thin films deposited by PECVD using TEOS and cyclohexene for ULSI interlayer-dielectric application

Seo, H. J. / Nam, S. H. / Kim, S. et al. | British Library Online Contents | 2015

Visible photoluminescence from the annealed TEOS SiO2

Xu, M. / Xu, S. / Ee, Y. C. et al. | British Library Online Contents | 2006

TEOS-Based Oxides: Deposition Dependent Properties

Saran, M. / Emesh, I. | British Library Online Contents | 1993