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Ion Energy Distributions and Sidewall Profiles in Reactive Ion Etching

May, P. W. / Field, D. / Klemperer, D. F. / Song, Y. P.

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Ion Energy Distributions and Sidewall Profiles in Reactive Ion Etching

May, P. W. / Field, D. / Klemperer, D. F. / Song, Y. P.

Ion Energy Distributions and Sidewall Profiles in Reactive Ion Etching

May, P. W. / Field, D. / Klemperer, D. F. / Song, Y. P.

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Document information

Title:

Ion Energy Distributions and Sidewall Profiles in Reactive Ion Etching

Contributors:

May, P. W. (author) / Field, D. (author) / Klemperer, D. F. (author) / Song, Y. P. (author)

Published in:

MATERIALS SCIENCE FORUM ; 121

Publication date:

1993-01-01

Size:

121 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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