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    Realization of Silicon Nanopillar Arrays with Controllable Sidewall Profiles by Holography Lithography and a Novel Single-Step Deep Reactive Ion Etching

    New search for: Hung, Y.-J.
    New search for: Lee, S.-L.
    New search for: Thibeault, B.J.
    New search for: Coldren, L.A.
    New search for: Riel, Heike

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    Realization of Silicon Nanopillar Arrays with Controllable Sidewall Profiles by Holography Lithography and a Novel Single-Step Deep Reactive Ion Etching

    New search for: Hung, Y.-J.
    New search for: Lee, S.-L.
    New search for: Thibeault, B.J.
    New search for: Coldren, L.A.
    New search for: Riel, Heike

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Realization of Silicon Nanopillar Arrays with Controllable Sidewall Profiles by Holography Lithography and a Novel Single-Step Deep Reactive Ion Etching

    New search for: Hung, Y.-J.
    New search for: Lee, S.-L.
    New search for: Thibeault, B.J.
    New search for: Coldren, L.A.
    New search for: Riel, Heike

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Realization of Silicon Nanopillar Arrays with Controllable Sidewall Profiles by Holography Lithography and a Novel Single-Step Deep Reactive Ion Etching

    Contributors:

    Hung, Y.-J. (author) / Lee, S.-L. (author) / Thibeault, B.J. (author) / Coldren, L.A. (author) / Riel, Heike / Materials Research Society

    Conference:

    MRS spring meeting; Low-dimensional functional nanostructures - fabrication, characterization and applications: symposium / ; 2010 ; San Francisco, CA

    Published in:

    MRS spring meeting; Low-dimensional functional nanostructures - fabrication, characterization and applications: symposium / ; 195-208

    MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS ; 1258

    Publication date:

    2010-01-01

    Size:

    14 pages

    Remarks:

    Includes bibliographical references and indexes.

    ISBN:

    9781605112350

    ISSN:

    0272-9172

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    Low-dimensional functional nanostructures , Materials research , MRS

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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