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Alkane Plasma Etching of Gallium Arsenide

Law, V. J. / Tewordt, M. / Ingram, S. G. / Jones, G. A. C.

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Alkane Plasma Etching of Gallium Arsenide

Law, V. J. / Tewordt, M. / Ingram, S. G. / Jones, G. A. C.

Alkane Plasma Etching of Gallium Arsenide

Law, V. J. / Tewordt, M. / Ingram, S. G. / Jones, G. A. C.

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Order at Subito €

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Document information

Title:

Alkane Plasma Etching of Gallium Arsenide

Contributors:

Law, V. J. (author) / Tewordt, M. (author) / Ingram, S. G. (author) / Jones, G. A. C. (author)

Published in:

MATERIALS SCIENCE FORUM ; 659

Publication date:

1993-01-01

Size:

659 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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