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Alkane Plasma Etching of Gallium Arsenide
Alkane Plasma Etching of Gallium Arsenide
Alkane Plasma Etching of Gallium Arsenide
Law, V. J. (author) / Tewordt, M. (author) / Ingram, S. G. (author) / Jones, G. A. C. (author)
MATERIALS SCIENCE FORUM ; 659
1993-01-01
659 pages
Article (Journal)
Unknown
DDC:
620.11
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