Oxide formation during etching of gallium arsenide: Fid-Bau Portal

Oxide formation during etching of gallium arsenide

Ghidaoui, D. / Lyon, S. B. / Thompson, G. E. / Walton, J.

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Oxide formation during etching of gallium arsenide

Ghidaoui, D. / Lyon, S. B. / Thompson, G. E. / Walton, J.

Oxide formation during etching of gallium arsenide

Ghidaoui, D. / Lyon, S. B. / Thompson, G. E. / Walton, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Oxide formation during etching of gallium arsenide

Contributors:

Ghidaoui, D. (author) / Lyon, S. B. (author) / Thompson, G. E. (author) / Walton, J. (author)

Published in:

CORROSION SCIENCE ; 44 ; 501-509

Publication date:

2002-01-01

Size:

9 pages

ISSN:

0010-938X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.16205 / 620

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