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Parametric study of the chemical vapour deposition of carbon-boron-nitrogen compounds

Derre, A. / Filipozzi, L. / Bouyer, F. / Marchand, A.

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Parametric study of the chemical vapour deposition of carbon-boron-nitrogen compounds

Derre, A. / Filipozzi, L. / Bouyer, F. / Marchand, A.

Parametric study of the chemical vapour deposition of carbon-boron-nitrogen compounds

Derre, A. / Filipozzi, L. / Bouyer, F. / Marchand, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Parametric study of the chemical vapour deposition of carbon-boron-nitrogen compounds

Contributors:

Derre, A. (author) / Filipozzi, L. (author) / Bouyer, F. (author) / Marchand, A. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 29 ; 1589

Publication date:

1994-01-01

Size:

1589 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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