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Species-specific growth kinetics and film properties in synchrotron radiation-excited Si growth with disilane
Species-specific growth kinetics and film properties in synchrotron radiation-excited Si growth with disilane
Species-specific growth kinetics and film properties in synchrotron radiation-excited Si growth with disilane
Akazawa, H. (author) / Utsumi, Y. (author) / Nagase, M. (author)
APPLIED SURFACE SCIENCE ; 79/80 ; 299
1994-01-01
299 pages
Article (Journal)
Unknown
DDC:
621.35
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