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New dry-etch chemistries for III-V semiconductors

Pearton, S. J. / Chakrabarti, U. K. / Ren, F. / Abernathy, C. R.

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New dry-etch chemistries for III-V semiconductors

Pearton, S. J. / Chakrabarti, U. K. / Ren, F. / Abernathy, C. R.

New dry-etch chemistries for III-V semiconductors

Pearton, S. J. / Chakrabarti, U. K. / Ren, F. / Abernathy, C. R.

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Check availability in my library

Order at Subito €

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Document information

Title:

New dry-etch chemistries for III-V semiconductors

Contributors:

Pearton, S. J. (author) / Chakrabarti, U. K. (author) / Ren, F. (author) / Abernathy, C. R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 25 ; 179

Publication date:

1994-01-01

Size:

179 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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