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Dry etch chemistries for TiO2 thin films
Dry etch chemistries for TiO2 thin films
Dry etch chemistries for TiO2 thin films
Norasetthekul, S. (author) / Park, P. Y. (author) / Baik, K. H. (author) / Lee, K. P. (author) / Shin, J. H. (author) / Jeong, B. S. (author) / Shishodia, V. (author) / Lambers, E. S. (author) / Norton, D. P. (author) / Pearton, S. J. (author)
APPLIED SURFACE SCIENCE ; 185 ; 27-33
2001-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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