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Dry etch chemistries for TiO2 thin films

Norasetthekul, S. / Park, P. Y. / Baik, K. H. / Lee, K. P. / Shin, J. H. / Jeong, B. S. / Shishodia, V. / Lambers, E. S. / Norton, D. P. / Pearton, S. J.

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Dry etch chemistries for TiO2 thin films

Norasetthekul, S. / Park, P. Y. / Baik, K. H. / Lee, K. P. / Shin, J. H. / Jeong, B. S. / Shishodia, V. / Lambers, E. S. / Norton, D. P. / Pearton, S. J.

Dry etch chemistries for TiO2 thin films

Norasetthekul, S. / Park, P. Y. / Baik, K. H. / Lee, K. P. / Shin, J. H. / Jeong, B. S. / Shishodia, V. / Lambers, E. S. / Norton, D. P. / Pearton, S. J.

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Title:

Dry etch chemistries for TiO2 thin films

Contributors:

Norasetthekul, S. (author) / Park, P. Y. (author) / Baik, K. H. (author) / Lee, K. P. (author) / Shin, J. H. (author) / Jeong, B. S. (author) / Shishodia, V. (author) / Lambers, E. S. (author) / Norton, D. P. (author) / Pearton, S. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 185 ; 27-33

Publication date:

2001-01-01

Size:

7 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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