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Characterization of adsorption in flow type atomic layer epitaxy reactor

Aarik, J. / Siimon, H.

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Characterization of adsorption in flow type atomic layer epitaxy reactor

Aarik, J. / Siimon, H.

Characterization of adsorption in flow type atomic layer epitaxy reactor

Aarik, J. / Siimon, H.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characterization of adsorption in flow type atomic layer epitaxy reactor

Contributors:

Aarik, J. (author) / Siimon, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 81 ; 281

Publication date:

1994-01-01

Size:

281 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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