In situ spectroscopic ellipsometry studies of electron cyclotron resonance (ECR) plasma etching of oxides of silicon and GaAs

Ianno, N. J. / Nafis, S. / Snyder, P. G. et al. | British Library Online Contents | 1993

High-rate electron cyclotron resonance etching of GaAs via holes

Chen, Y. W. / Ooi, B. S. / Ng, G. I. et al. | British Library Online Contents | 2000

Electron cyclotron resonance plasma-assisted reactive pulsed laser deposition of compound films

Sun, J. / Wu, J. D. / Ling, H. et al. | British Library Online Contents | 2002

Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Wang, Z. / Ba, D. / Cao, P. et al. | British Library Online Contents | 2007

Deposition of diamond onto aluminum by electron cyclotron resonance microwave plasma-assisted CVD

Eddy, C. R. / Youchison, D. L. / Sartwell, B. D. et al. | British Library Online Contents | 1992