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High-rate electron cyclotron resonance etching of GaAs via holes

Chen, Y. W. / Ooi, B. S. / Ng, G. I. / Tan, C. L.

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High-rate electron cyclotron resonance etching of GaAs via holes

Chen, Y. W. / Ooi, B. S. / Ng, G. I. / Tan, C. L.

High-rate electron cyclotron resonance etching of GaAs via holes

Chen, Y. W. / Ooi, B. S. / Ng, G. I. / Tan, C. L.

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Document information

Title:

High-rate electron cyclotron resonance etching of GaAs via holes

Contributors:

Chen, Y. W. ( author ) / Ooi, B. S. ( author ) / Ng, G. I. ( author ) / Tan, C. L. ( author )

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 74 ; 282 - 285

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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