High-rate electron cyclotron resonance etching of GaAs via holes: Fid-Bau Portal

High-rate electron cyclotron resonance etching of GaAs via holes

Chen, Y. W. / Ooi, B. S. / Ng, G. I. / Tan, C. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

High-rate electron cyclotron resonance etching of GaAs via holes

Chen, Y. W. / Ooi, B. S. / Ng, G. I. / Tan, C. L.

High-rate electron cyclotron resonance etching of GaAs via holes

Chen, Y. W. / Ooi, B. S. / Ng, G. I. / Tan, C. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

High-rate electron cyclotron resonance etching of GaAs via holes

Contributors:

Chen, Y. W. (author) / Ooi, B. S. (author) / Ng, G. I. (author) / Tan, C. L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 74 ; 282 - 285

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ianno, N. J. / Nafis, S. / Snyder, P. G. et al. | British Library Online Contents | 1993

High-Rate Sputtering with Electron Cyclotron Resonance and Electric-Mirror Excitation

Matsuoka, M. | British Library Online Contents | 1993

Electron cyclotron resonance plasma deposition and etching of silicon nitride on GaSb for optoelectronic applications

Bonnot, R. / Gouskov, A. / Bougnot, G. | British Library Online Contents | 1994

Impurity cyclotron resonance in type-I (GaAs)"n/(AlAs)"n superlattices

Momose, H. / Mori, N. / Hamaguchi, C. et al. | British Library Online Contents | 1999

On the accumulation capacitance of Si~3N~4/Si/GaAs structures fabricated in an electron cyclotron resonance plasma

Ivanco, J. / Balvinsky, O. E. / Thurzo, I. et al. | British Library Online Contents | 1993