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    Optical in-situ analysis of GaAs/AlAs/GaAs and GaAs/(Al)GaAs/GaAs atomic layer growth using GaCl~3, AlCl~3 and AsH~3

    New search for: Akamatsu, M.
    New search for: Narahara, S.
    New search for: Kobayashi, T.
    New search for: Hasegawa, F.

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    Optical in-situ analysis of GaAs/AlAs/GaAs and GaAs/(Al)GaAs/GaAs atomic layer growth using GaCl~3, AlCl~3 and AsH~3

    New search for: Akamatsu, M.
    New search for: Narahara, S.
    New search for: Kobayashi, T.
    New search for: Hasegawa, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Optical in-situ analysis of GaAs/AlAs/GaAs and GaAs/(Al)GaAs/GaAs atomic layer growth using GaCl~3, AlCl~3 and AsH~3

    New search for: Akamatsu, M.
    New search for: Narahara, S.
    New search for: Kobayashi, T.
    New search for: Hasegawa, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Optical in-situ analysis of GaAs/AlAs/GaAs and GaAs/(Al)GaAs/GaAs atomic layer growth using GaCl~3, AlCl~3 and AsH~3

    Contributors:

    Akamatsu, M. (author) / Narahara, S. (author) / Kobayashi, T. (author) / Hasegawa, F. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 82/83 ; 228

    Publication date:

    1994-01-01

    Size:

    228 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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