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Sputtering effects in hexagonal silicon carbide

Pezoldt, J. / Stottko, B. / Kupris, G. / Ecke, G.

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Sputtering effects in hexagonal silicon carbide

Pezoldt, J. / Stottko, B. / Kupris, G. / Ecke, G.

Sputtering effects in hexagonal silicon carbide

Pezoldt, J. / Stottko, B. / Kupris, G. / Ecke, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Sputtering effects in hexagonal silicon carbide

Contributors:

Pezoldt, J. (author) / Stottko, B. (author) / Kupris, G. (author) / Ecke, G. (author) / Fricke, K. / Krozer, V.

Published in:

High Temperature Electronics: Materials Devices Applications ; 94

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 29

Publication date:

1995-01-01

Size:

94 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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