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Chemical sputtering of amorphous silicon carbide under hydrogen bombardment

Salonen, E. / Nordlund, K. / Keinonen, J. / Wu, C. H.

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Chemical sputtering of amorphous silicon carbide under hydrogen bombardment

Salonen, E. / Nordlund, K. / Keinonen, J. / Wu, C. H.

Chemical sputtering of amorphous silicon carbide under hydrogen bombardment

Salonen, E. / Nordlund, K. / Keinonen, J. / Wu, C. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Chemical sputtering of amorphous silicon carbide under hydrogen bombardment

Contributors:

Salonen, E. (author) / Nordlund, K. (author) / Keinonen, J. (author) / Wu, C. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 184 ; 387-390

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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