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Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers

Chandler, T. C. / Lari, M. B. / Sudarshan, T. S.

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Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers

Chandler, T. C. / Lari, M. B. / Sudarshan, T. S.

Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers

Chandler, T. C. / Lari, M. B. / Sudarshan, T. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers

Contributors:

Chandler, T. C. (author) / Lari, M. B. (author) / Sudarshan, T. S. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 845-848

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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