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A Test Structure for the Determination of LOCOS/WELL Misalignments in CMOS Technology

Georgiev, N. P. / Stamenova, P. S.

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A Test Structure for the Determination of LOCOS/WELL Misalignments in CMOS Technology

Georgiev, N. P. / Stamenova, P. S.

A Test Structure for the Determination of LOCOS/WELL Misalignments in CMOS Technology

Georgiev, N. P. / Stamenova, P. S.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A Test Structure for the Determination of LOCOS/WELL Misalignments in CMOS Technology

Contributors:

Georgiev, N. P. (author) / Stamenova, P. S. (author)

Published in:

COMPTES RENDUS- ACADEMIE BULGARE DES SCIENCES ; 47 ; 31

Publication date:

1994-01-01

Size:

31 pages

ISSN:

0861-1459

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 500

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