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    Anisotropic etching of silicon crystals in KOH solution: Part II Theoretical two-dimensional etched shapes: discussion of the adequation of the dissolution slowness surface

    New search for: Tellier, C. R.
    New search for: Brahim-Bounab, A.

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    Anisotropic etching of silicon crystals in KOH solution: Part II Theoretical two-dimensional etched shapes: discussion of the adequation of the dissolution slowness surface

    New search for: Tellier, C. R.
    New search for: Brahim-Bounab, A.

    Access

    Access via TIB
    Check availability in my library
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    Anisotropic etching of silicon crystals in KOH solution: Part II Theoretical two-dimensional etched shapes: discussion of the adequation of the dissolution slowness surface

    New search for: Tellier, C. R.
    New search for: Brahim-Bounab, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Anisotropic etching of silicon crystals in KOH solution: Part II Theoretical two-dimensional etched shapes: discussion of the adequation of the dissolution slowness surface

    Contributors:

    Tellier, C. R. (author) / Brahim-Bounab, A. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 29 ; 6354

    Publication date:

    1994-01-01

    Size:

    6354 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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