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Tellier, C. R. / Brahim-Bounab, A. | British Library Online Contents | 1994

Anisotropic etching of silicon crystals in KOH solution: Part II Theoretical two-dimensional etched shapes: discussion of the adequation of the dissolution slowness surface

Tellier, C. R. / Brahim-Bounab, A. | British Library Online Contents | 1994

Experimental Study of Kerf Machined by Micro-WEDM

Di, S.C. / Chu, X.Y. / Wei, D.B. et al. | British Library Online Contents | 2009

Fatigue crack growth in micro-machined single-crystal silicon

Renuart, E. D. / Fitzgerald, A. M. / Kenny, T. W. et al. | British Library Online Contents | 2004

A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution

Lv, Y. / Cui, H.J. / Dong, P.T. et al. | British Library Online Contents | 2012