CCl~4-assisted CF~4 etching of silicon in a microwave-assisted LDE (laser dry etching)-process: Fid-Bau Portal

CCl~4-assisted CF~4 etching of silicon in a microwave-assisted LDE (laser dry etching)-process

Pfleging, W. / Wesner, D. A. / Kreutz, E. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

CCl~4-assisted CF~4 etching of silicon in a microwave-assisted LDE (laser dry etching)-process

Pfleging, W. / Wesner, D. A. / Kreutz, E. W.

CCl~4-assisted CF~4 etching of silicon in a microwave-assisted LDE (laser dry etching)-process

Pfleging, W. / Wesner, D. A. / Kreutz, E. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

CCl~4-assisted CF~4 etching of silicon in a microwave-assisted LDE (laser dry etching)-process

Contributors:

Pfleging, W. (author) / Wesner, D. A. (author) / Kreutz, E. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 96/98 ; 496-500

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Pfleging, W. / Kreutz, E. W. / Wehner, M. et al. | British Library Conference Proceedings | 1995

Optimization of silver-assisted nano-pillar etching process in silicon

Azhari, A. W. / Sopian, K. / Desa, M. K. et al. | British Library Online Contents | 2015

Laser-assisted dry etching ablation of InP

Dubowski, J. J. / Compaan, A. / Prasad, M. | British Library Online Contents | 1995

Laser-assisted etching-like damage of Si

Simakin, A. V. / Shafeev, G. A. | British Library Online Contents | 1995

Excimer laser-assisted etching of silicon in chlorine: adsorption and desorption

Kuzmichov, A. V. | British Library Online Contents | 1995