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Microstructure of TiN films and interfaces formed by ion-beam-enhanced deposition and simple physical vapor deposition
Microstructure of TiN films and interfaces formed by ion-beam-enhanced deposition and simple physical vapor deposition
Microstructure of TiN films and interfaces formed by ion-beam-enhanced deposition and simple physical vapor deposition
Cheng, Z. Y. et al. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 10 ; 995
1995-01-01
995 pages
Article (Journal)
Unknown
DDC:
620.11
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