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    Dielectric properties of AlN thin films formed by ion beam enhanced deposition

    New search for: Song, Z. R.
    New search for: Yu, Y. H.
    New search for: Shen, D. S.
    New search for: Zou, S. C.
    New search for: Zheng, Z. H.
    New search for: Luo, E. Z.
    New search for: Xie, Z.

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    Dielectric properties of AlN thin films formed by ion beam enhanced deposition

    New search for: Song, Z. R.
    New search for: Yu, Y. H.
    New search for: Shen, D. S.
    New search for: Zou, S. C.
    New search for: Zheng, Z. H.
    New search for: Luo, E. Z.
    New search for: Xie, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Dielectric properties of AlN thin films formed by ion beam enhanced deposition

    New search for: Song, Z. R.
    New search for: Yu, Y. H.
    New search for: Shen, D. S.
    New search for: Zou, S. C.
    New search for: Zheng, Z. H.
    New search for: Luo, E. Z.
    New search for: Xie, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Dielectric properties of AlN thin films formed by ion beam enhanced deposition

    Contributors:

    Song, Z. R. (author) / Yu, Y. H. (author) / Shen, D. S. (author) / Zou, S. C. (author) / Zheng, Z. H. (author) / Luo, E. Z. (author) / Xie, Z. (author)

    Published in:

    MATERIALS LETTERS ; 57 ; 4643-4647

    Publication date:

    2003-01-01

    Size:

    5 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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