Carrier transport in heavily doped polycrystalline silicon layers after annealing by a scanning laser beam: Fid-Bau Portal

Carrier transport in heavily doped polycrystalline silicon layers after annealing by a scanning laser beam

Fedotov, A. K. / Tarasik, M. I. / Yanchenko, A. M.

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Carrier transport in heavily doped polycrystalline silicon layers after annealing by a scanning laser beam

Fedotov, A. K. / Tarasik, M. I. / Yanchenko, A. M.

Carrier transport in heavily doped polycrystalline silicon layers after annealing by a scanning laser beam

Fedotov, A. K. / Tarasik, M. I. / Yanchenko, A. M.

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Check availability in my library

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Document information

Title:

Carrier transport in heavily doped polycrystalline silicon layers after annealing by a scanning laser beam

Contributors:

Fedotov, A. K. (author) / Tarasik, M. I. (author) / Yanchenko, A. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 84 ; 379

Publication date:

1995-01-01

Size:

379 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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