The Effect of Dopant Dose Loss During Annealing on Heavily Doped Surface Layers Obtained by Recoil Implantation of Antimony in Silicon: Fid-Bau Portal

The Effect of Dopant Dose Loss During Annealing on Heavily Doped Surface Layers Obtained by Recoil Implantation of Antimony in Silicon

Mesli, M.N. / Benbahi, B. / Bouafia, H. / Belmekki, M. / Abidri, B. / Hiadsi, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

The Effect of Dopant Dose Loss During Annealing on Heavily Doped Surface Layers Obtained by Recoil Implantation of Antimony in Silicon

Mesli, M.N. / Benbahi, B. / Bouafia, H. / Belmekki, M. / Abidri, B. / Hiadsi, S.

The Effect of Dopant Dose Loss During Annealing on Heavily Doped Surface Layers Obtained by Recoil Implantation of Antimony in Silicon

Mesli, M.N. / Benbahi, B. / Bouafia, H. / Belmekki, M. / Abidri, B. / Hiadsi, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

The Effect of Dopant Dose Loss During Annealing on Heavily Doped Surface Layers Obtained by Recoil Implantation of Antimony in Silicon

Contributors:

Mesli, M.N. (author) / Benbahi, B. (author) / Bouafia, H. (author) / Belmekki, M. (author) / Abidri, B. (author) / Hiadsi, S. (author)

Published in:

SURFACE REVIEW AND LETTERS ; 20 ; 1350038

Publication date:

2013-01-01

Size:

1350038 pages

ISSN:

0218-625X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530.417

Fedotov, A. K. / Tarasik, M. I. / Yanchenko, A. M. | British Library Online Contents | 1995

Influence of Dopant Species on Electron Mobility in Heavily Doped Semiconductors

Kaiblinger-Grujin, G. / Kosina, H. / Koepf, C. et al. | British Library Online Contents | 1997

Atomistic modeling of dopant implantation and annealing in Si: damage evolution, dopant diffusion and activation

Pelaz, L. / Marqués, L. A. / Aboy, M. et al. | British Library Online Contents | 2005

Annealing behavior of phosphorus in native oxide films on heavily phosphorus doped silicon

Ying, W. B. / Mizokawa, Y. / Yu, Y. B. et al. | British Library Online Contents | 1996

Annealing behavior of phosphorus in native oxide films on heavily phosphorus doped silicon

Ying, W. B. / Mizokawa, Y. / Yu, Y. B. et al. | British Library Online Contents | 1996