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Gas permeabilities in thermally grown silicon dioxide films

Li, Y.-L. / Pinto, N. G. / Henderson, H. T. / Hwang, S.-T.

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Gas permeabilities in thermally grown silicon dioxide films

Li, Y.-L. / Pinto, N. G. / Henderson, H. T. / Hwang, S.-T.

Gas permeabilities in thermally grown silicon dioxide films

Li, Y.-L. / Pinto, N. G. / Henderson, H. T. / Hwang, S.-T.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Gas permeabilities in thermally grown silicon dioxide films

Contributors:

Li, Y.-L. (author) / Pinto, N. G. (author) / Henderson, H. T. (author) / Hwang, S.-T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 32 ; 63

Publication date:

1995-01-01

Size:

63 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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