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Three-dimensional analysis of modulated photoreflectance in a silicon wafer

Kim, H. C. / Sun Chul Kim / Moon Gyu Jang / Jeong Ki Lee

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Three-dimensional analysis of modulated photoreflectance in a silicon wafer

Kim, H. C. / Sun Chul Kim / Moon Gyu Jang / Jeong Ki Lee

Three-dimensional analysis of modulated photoreflectance in a silicon wafer

Kim, H. C. / Sun Chul Kim / Moon Gyu Jang / Jeong Ki Lee

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Three-dimensional analysis of modulated photoreflectance in a silicon wafer

Contributors:

Kim, H. C. (author) / Sun Chul Kim (author) / Moon Gyu Jang (author) / Jeong Ki Lee (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 30 ; 3761

Publication date:

1995-01-01

Size:

3761 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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