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Influence of CH~4/H~2 reactive ion etching on electrical and optical properties of AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures
Influence of CH~4/H~2 reactive ion etching on electrical and optical properties of AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures
Influence of CH~4/H~2 reactive ion etching on electrical and optical properties of AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures
Van Es, C. M. (author) / Eijkemans, T. J. (author) / Wolter, J. H. (author) / Pereira, R. (author)
1995-01-01
41 pages
Article (Journal)
Unknown
DDC:
620.11
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