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Improving reactive ion etching selectivity of GaAs/AlGaAs with He plus

Lin, C. S. / Fang, Y. K. / Chen, S. F. / Lin, C. Y. / Hsieh, M. C. / Wang, C. C. / Huang, H. K. / Wu, C. L. / Chang, C. S.

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Improving reactive ion etching selectivity of GaAs/AlGaAs with He plus

Lin, C. S. / Fang, Y. K. / Chen, S. F. / Lin, C. Y. / Hsieh, M. C. / Wang, C. C. / Huang, H. K. / Wu, C. L. / Chang, C. S.

Improving reactive ion etching selectivity of GaAs/AlGaAs with He plus

Lin, C. S. / Fang, Y. K. / Chen, S. F. / Lin, C. Y. / Hsieh, M. C. / Wang, C. C. / Huang, H. K. / Wu, C. L. / Chang, C. S.

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Title:

Improving reactive ion etching selectivity of GaAs/AlGaAs with He plus

Contributors:

Lin, C. S. (author) / Fang, Y. K. (author) / Chen, S. F. (author) / Lin, C. Y. (author) / Hsieh, M. C. (author) / Wang, C. C. (author) / Huang, H. K. (author) / Wu, C. L. (author) / Chang, C. S. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 59-62

Publication date:

2004-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Aperathitis, E. / Cengher, D. / Kayambaki, M. et al. | British Library Online Contents | 2001

Influence of CH~4/H~2 reactive ion etching on electrical and optical properties of AlGaAs/GaAs and pseudomorphic AlGaAs/InGaAs/GaAs heterostructures

Van Es, C. M. / Eijkemans, T. J. / Wolter, J. H. et al. | British Library Online Contents | 1995

Selective dry etching using inductively coupled plasmas - Part I. GaAs/AlGaAs and GaAs/InGaP

Hays, D.C. / Cho, H. / Jung, K.B. et al. | British Library Online Contents | 1999

High selectivity Inductively Coupled Plasma etching of GaAs over InGaP

Hays, D. C. / Cho, H. / Lee, J. W. et al. | British Library Online Contents | 2000

Spontaneous formation of a tilted AlGaAs/GaAs superlattice during AlGaAs growth

Hartmann, A. / Dieker, C. / Hollfelder, M. et al. | British Library Online Contents | 1998