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Characterization of TiN films grown by reactive d.c. triode sputtering onto copper substrates

Benhenda, S. / Guglielmacci, J. M. / Gillet, M.

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Characterization of TiN films grown by reactive d.c. triode sputtering onto copper substrates

Benhenda, S. / Guglielmacci, J. M. / Gillet, M.

Characterization of TiN films grown by reactive d.c. triode sputtering onto copper substrates

Benhenda, S. / Guglielmacci, J. M. / Gillet, M.

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Order at Subito €

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Document information

Title:

Characterization of TiN films grown by reactive d.c. triode sputtering onto copper substrates

Contributors:

Benhenda, S. (author) / Guglielmacci, J. M. (author) / Gillet, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 34 ; 36

Publication date:

1995-01-01

Size:

36 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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