Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering: Fid-Bau Portal

Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering

Saoula, N. / Henda, K. / Kesri, R.

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Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering

Saoula, N. / Henda, K. / Kesri, R.

Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering

Saoula, N. / Henda, K. / Kesri, R.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering

Contributors:

Saoula, N. (author) / Henda, K. (author) / Kesri, R. (author) / Gabouze, N.

Published in:

Thin Films and Porous Materials ; 117-122

MATERIALS SCIENCE FORUM ; 609

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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