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In situ DC-plasma cleaning of silicon surfaces
In situ DC-plasma cleaning of silicon surfaces
In situ DC-plasma cleaning of silicon surfaces
Kafader, U. (author) / Sirringhaus, H. (author) / Von Kaenel, H. (author)
APPLIED SURFACE SCIENCE ; 90 ; 297
1995-01-01
297 pages
Article (Journal)
Unknown
DDC:
621.35
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