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Plasma cleaning of carbon species for silicon homoepitaxial growth

Kim, H. W. / Hwang, W. S. / Lee, C. / Reif, R.

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Plasma cleaning of carbon species for silicon homoepitaxial growth

Kim, H. W. / Hwang, W. S. / Lee, C. / Reif, R.

Plasma cleaning of carbon species for silicon homoepitaxial growth

Kim, H. W. / Hwang, W. S. / Lee, C. / Reif, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Plasma cleaning of carbon species for silicon homoepitaxial growth

Contributors:

Kim, H. W. (author) / Hwang, W. S. (author) / Lee, C. (author) / Reif, R. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 1067-1068

Publication date:

2003-01-01

Size:

2 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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