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Plasma cleaning of carbon species for silicon homoepitaxial growth
Plasma cleaning of carbon species for silicon homoepitaxial growth
Plasma cleaning of carbon species for silicon homoepitaxial growth
Kim, H. W. (author) / Hwang, W. S. (author) / Lee, C. (author) / Reif, R. (author)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 1067-1068
2003-01-01
2 pages
Article (Journal)
English
DDC:
620.11
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