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Atomic hydrogen-assisted ALE of germanium

Sugahara, S. / Kadoshima, M. / Kitamura, T. / Imai, S.

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Atomic hydrogen-assisted ALE of germanium

Sugahara, S. / Kadoshima, M. / Kitamura, T. / Imai, S.

Atomic hydrogen-assisted ALE of germanium

Sugahara, S. / Kadoshima, M. / Kitamura, T. / Imai, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Atomic hydrogen-assisted ALE of germanium

Contributors:

Sugahara, S. (author) / Kadoshima, M. (author) / Kitamura, T. (author) / Imai, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 90 ; 349

Publication date:

1995-01-01

Size:

349 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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Atomic layer etching of germanium

Ikeda, K. / Imai, S. / Matsumura, M. | British Library Online Contents | 1997

Atomic layer epitaxy of germanium

Sugahara, S. / Kitamura, T. / Imai, S. et al. | British Library Online Contents | 1994

Modeling of germanium atomic-layer-epitaxy

Sugahara, S. / Matsumura, M. | British Library Online Contents | 1997