Atomic layer epitaxy of germanium

Sugahara, S. / Kitamura, T. / Imai, S. et al. | British Library Online Contents | 1994

Modeling of germanium atomic-layer-epitaxy

Sugahara, S. / Matsumura, M. | British Library Online Contents | 1997

Enabling control of matter at the atomic level: atomic layer deposition and fluorocarbon-based atomic layer etching

Dallorto, Stefano | BASE | 2020

Black germanium produced by inductively coupled plasma etching

Schicho, S. / Jaouad, A. / Sellmer, C. et al. | British Library Online Contents | 2013

Atomic-layer etching of Ge using an ultraclean ECR plasma

Sugiyama, T. / Matsuura, T. / Murota, J. | British Library Online Contents | 1997