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    Surface deformation and electrical properties of HfN thin films deposited by reactive sputtering

    New search for: Nowak, R.
    New search for: Maruno, S.

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    Surface deformation and electrical properties of HfN thin films deposited by reactive sputtering

    New search for: Nowak, R.
    New search for: Maruno, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Surface deformation and electrical properties of HfN thin films deposited by reactive sputtering

    New search for: Nowak, R.
    New search for: Maruno, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Surface deformation and electrical properties of HfN thin films deposited by reactive sputtering

    Contributors:

    Nowak, R. (author) / Maruno, S. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 202 ; 226

    Publication date:

    1995-01-01

    Size:

    226 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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