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Surface deformation and electrical properties of HfN thin films deposited by reactive sputtering
Surface deformation and electrical properties of HfN thin films deposited by reactive sputtering
Surface deformation and electrical properties of HfN thin films deposited by reactive sputtering
Nowak, R. (Autor:in) / Maruno, S. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 202 ; 226
01.01.1995
226 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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