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Copper thin films prepared by chemical vapour deposition from copper (II) acetylacetonate

Maruyama, T. / Shirai, T.

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Copper thin films prepared by chemical vapour deposition from copper (II) acetylacetonate

Maruyama, T. / Shirai, T.

Copper thin films prepared by chemical vapour deposition from copper (II) acetylacetonate

Maruyama, T. / Shirai, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Copper thin films prepared by chemical vapour deposition from copper (II) acetylacetonate

Contributors:

Maruyama, T. (author) / Shirai, T. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 30 ; 5551

Publication date:

1995-01-01

Size:

5551 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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