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Spectroellipsometric characterisation of thin epitaxial Si~1~-~xGe~x layers

Libezny, M. / Caymax, M. / Brablec, A. / Kubena, J. / Holy, V. / Poortmans, J. / Nijs, J. / Vanhellemont, J.

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Spectroellipsometric characterisation of thin epitaxial Si~1~-~xGe~x layers

Libezny, M. / Caymax, M. / Brablec, A. / Kubena, J. / Holy, V. / Poortmans, J. / Nijs, J. / Vanhellemont, J.

Spectroellipsometric characterisation of thin epitaxial Si~1~-~xGe~x layers

Libezny, M. / Caymax, M. / Brablec, A. / Kubena, J. / Holy, V. / Poortmans, J. / Nijs, J. / Vanhellemont, J.

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Check availability in my library

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Document information

Title:

Spectroellipsometric characterisation of thin epitaxial Si~1~-~xGe~x layers

Contributors:

Libezny, M. (author) / Caymax, M. (author) / Brablec, A. (author) / Kubena, J. (author) / Holy, V. (author) / Poortmans, J. (author) / Nijs, J. (author) / Vanhellemont, J. (author)

Published in:

MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 11 ; 1065-1070

Publication date:

1995-01-01

Size:

6 pages

ISSN:

0267-0836

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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