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    Collimated Sputtering of Titanium and Titanium Nitride Films

    New search for: Ryan, J. G.
    New search for: Brodsky, S. B.
    New search for: Katata, T.
    New search for: Honda, M.
    New search for: Shoda, N.
    New search for: Aochi, H.

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    Collimated Sputtering of Titanium and Titanium Nitride Films

    New search for: Ryan, J. G.
    New search for: Brodsky, S. B.
    New search for: Katata, T.
    New search for: Honda, M.
    New search for: Shoda, N.
    New search for: Aochi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Collimated Sputtering of Titanium and Titanium Nitride Films

    New search for: Ryan, J. G.
    New search for: Brodsky, S. B.
    New search for: Katata, T.
    New search for: Honda, M.
    New search for: Shoda, N.
    New search for: Aochi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Collimated Sputtering of Titanium and Titanium Nitride Films

    Contributors:

    Ryan, J. G. (author) / Brodsky, S. B. (author) / Katata, T. (author) / Honda, M. (author) / Shoda, N. (author) / Aochi, H. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 20 ; 42-45

    Publication date:

    1995-01-01

    Size:

    4 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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