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    Chemical-Vapor-Deposited Tungsten for Vertical Wiring

    New search for: Ohba, T.

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    Chemical-Vapor-Deposited Tungsten for Vertical Wiring

    New search for: Ohba, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical-Vapor-Deposited Tungsten for Vertical Wiring

    New search for: Ohba, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Chemical-Vapor-Deposited Tungsten for Vertical Wiring

    Contributors:

    Ohba, T. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 20 ; 46-52

    Publication date:

    1995-01-01

    Size:

    7 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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