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Chemical vapor deposited RuOx films: interfacial adhesion study

Ganesan, P. G. / Eizenberg, M.

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Chemical vapor deposited RuOx films: interfacial adhesion study

Ganesan, P. G. / Eizenberg, M.

Chemical vapor deposited RuOx films: interfacial adhesion study

Ganesan, P. G. / Eizenberg, M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Chemical vapor deposited RuOx films: interfacial adhesion study

Contributors:

Ganesan, P. G. (author) / Eizenberg, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 103 ; 213-218

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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