Chemical-Mechanical Planarization of Aluminum-Based Alloys for Multilevel Metallization: Fid-Bau Portal

Chemical-Mechanical Planarization of Aluminum-Based Alloys for Multilevel Metallization

Fury, M. A. / Scherber, D. L. / Stell, M. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Chemical-Mechanical Planarization of Aluminum-Based Alloys for Multilevel Metallization

Fury, M. A. / Scherber, D. L. / Stell, M. A.

Chemical-Mechanical Planarization of Aluminum-Based Alloys for Multilevel Metallization

Fury, M. A. / Scherber, D. L. / Stell, M. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Chemical-Mechanical Planarization of Aluminum-Based Alloys for Multilevel Metallization

Contributors:

Fury, M. A. (author) / Scherber, D. L. (author) / Stell, M. A. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 20 ; 61-64

Publication date:

1995-01-01

Size:

4 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Murarka, S. P. / Steigerwald, J. / Gutmann, R. J. | British Library Online Contents | 1993

Chemical mechanical polishing of copper for multilevel metallization

Stavreva, Z. / Zeidler, D. / Ploetner, M. et al. | British Library Online Contents | 1996

Advances in Chemical-Mechanical Planarization

Singh, R. K. / Bajaj, R. | British Library Online Contents | 2002

Particle Technology in Chemical Mechanical Planarization

Kalyan S. Gokhale / Brij M. Moudgil | DOAJ | 2014

Free access

Chemical-Mechanical Planarization of Semiconductor Materials

Oliver, Michael R. | TIBKAT | 2004