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Transmission electron microscopy characterization of a fluorine-doped Si~3N~4
Transmission electron microscopy characterization of a fluorine-doped Si~3N~4
Transmission electron microscopy characterization of a fluorine-doped Si~3N~4
Kleebe, H.-J. (author) / Pezzotti, G. (author) / Nishida, T. (author)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 14 ; 1668-1671
1995-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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