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Structural characterization of Ti implanted AlN

Borowski, M. / Traverse, A. / Dallas, J. P.

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Structural characterization of Ti implanted AlN

Borowski, M. / Traverse, A. / Dallas, J. P.

Structural characterization of Ti implanted AlN

Borowski, M. / Traverse, A. / Dallas, J. P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structural characterization of Ti implanted AlN

Contributors:

Borowski, M. (author) / Traverse, A. (author) / Dallas, J. P. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 10 ; 3136-3142

Publication date:

1995-01-01

Size:

7 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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