A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler
Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler
Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler
Poon, C. Y. (author) / Bhushan, B. (author)
WEAR -LAUSANNE- ; 190 ; 76-88
1995-01-01
13 pages
Article (Journal)
English
DDC:
620.11292
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A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system
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